Microcrystalline silicon thin film transistors obtained by hot-wire CVD
نویسندگان
چکیده
منابع مشابه
Thin-Film Transistors Obtained by Hot Wire CVD
(1) Departament d'Enginyeria Electrònica. Jordi Girona 1-3, Mòdul C4. Universitat Politècnica de Catalunya (Barcelona, Spain). (2) Departament d'Enginyeria Electrònica. Universitat Rovira i Virgili (Tarragona, Spain). (3) Departament de Física Aplicada i Òptica. Universitat de Barcelona (Barcelona, Spain) Abstract Hydrogenated microcrystalline silicon films obtained at low temperature (150oC-28...
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ژورنال
عنوان ژورنال: Materials Science and Engineering: B
سال: 2000
ISSN: 0921-5107
DOI: 10.1016/s0921-5107(99)00252-4